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Predictive Process Tuning - PreTune

Description

This Innosuisse funded project aims to implement an innovative, predictive process control enabled by an AI-supported multiperspectivedata analysis embedded in the process Digital Twin. The outcome will significantly improve the current level of productquality and enable more ecological semiconductor production.

Key data

Projectlead

Project partners

Hitachi Energy AG / Semiconductors

Project status

completed, 04/2021 - 11/2023

Institute/Centre

Institute of Mechatronic Systems (IMS)

Funding partner

Innovationsprojekt / Projekt Nr. 51514.1 IP-ENG

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